
Wafer XRD 200
The Wafer XRD is the fastest automated XRD technology solution monitoring offcut, flat or notch within seconds per wafer..
- 样品处理量
- 每月处理超 10000 片晶圆
- Geometry
- 根据要求
- 精度
- 倾斜精确度 0.003
- XRD axis vs notch / flat position
- 0.03°

The Wafer XRD is the fastest automated XRD technology solution monitoring offcut, flat or notch within seconds per wafer..