BOX COATER
Discover Angstrom Engineering’s Box Coater, a cleanroom-compatible coating platform for high-volume production. Ideal for production output.
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Box Coater is a flexible, cleanroom-compatible coating platform capable of low to high-volume production, capable of active modelling and correction of film thickness non-uniformity, material yield, and throughput.
Your research goals, production demands, and/or application end goals will inform how to outfit your Box Coater. It is well-suited for a variety of applications, including metallization, optical coatings, sensing, and indium bump bond fabrication.
Let’s work together to design the system that will perfectly suit your requirements.
100 mm - 1200 mm substrates
Wide variety of PVD processes
Option to be outfitted to achieve ultra-high vacuum (UHV)
SYSTEM BUILD OPTIONS
System Model Features
Sputtering
RF, DC, pulsed DC, HIPIMS, and reactive.
Circular, linear & cylindrical cathodes are available.
Thermal Evaporation
Utilize a wide range of boats, filaments & crucible heaters.
Auto-tuning for precise rate control.
Electron Beam Evaporation
Wide range of source power and power supply options available.
Programmable sweep controller with recipe storage.
Torque sensing crucible indexer detects pocket jams.
Option for multiple e-beam sources in the chamber.
Plasma & Ion Beam
A range of ion sources for cleaning and film enhancements, including glow discharge plasma cleaning.
Fixturing & Automation
Explore the enhancements and options that can be added to your EvoVac platform. Creating a system specifically engineered to meet your research and process requirements. These systems can be customized to any degree to meet the user’s application needs using the ideal components as well as precise process development.
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