ASM International A400 DUO 批量立式炉
A400 DUO
A400 DUO 是 ASM 面向 200 mm 及更小晶圆的批量立式炉，应用于功率、模拟、射频和 MEMS 器件市场。
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说明
A400 DUO 是 ASM 面向 200 mm 及更小晶圆的批量立式炉，应用于功率、模拟、射频和 MEMS 器件市场。
规格参数
- 型号：A400 DUO
- 产品名称：A400™ DUO
- A400 DUO is a batch vertical furnace for 200 mm and smaller wafers, and focuses on applications in the markets for power, analog, RF, and MEMS devices. The A400 DUO furnace tool is capable of running low pressure CVD (LPCVD), as well as dif
规格
| 型号 | A400 DUO |
|---|---|
| 产品名称 | A400™ DUO |
| 产品说明 | A400 DUO is a batch vertical furnace for 200 mm and smaller wafers, and focuses on applications in the markets for power, analog, RF, and MEMS devices. The A400 DUO furnace tool is capable of running low pressure CVD (LPCVD), as well as dif |
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