Transform® Series
Beneq Transform® is a one-stop ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
广西科米瑞实验仪器设备有限公司生产销售 Beneq Transform® Series,可提供产品参数、报价和售后服务咨询,价格面议。
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Beneq Transform® XP combines mini-batch thermal ALD, plasma-enhanced ALD with a proprietary in-cycle annealing step to deliver uniform films, stable interfaces, and high-quality material properties for advanced power and RF devices.
Beneq Transform®
Beneq Transform® is a one-stop ALD tool solution for Power Electronics, MEMS and Sensors, RF, LED, Photonics, and Advanced Packaging applications.
Beneq Transform® 300
Beneq Transform® 300 combines thermal and plasma ALD in an integrated 300 mm cluster tool for MtM applications including CIS, Power, Micro-OLED/LED, and Advanced Packaging.
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