EBARA EMT 涡轮分子泵
EMT
EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump.
广西科米瑞实验仪器设备有限公司生产销售 Ebara EMT，可提供产品参数、报价和售后服务咨询，价格面议。
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产品说明：EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump.
主要特点：Ultra-high vacuum, radiation resistant or with PK board inside, completely hydrocarbon-free, flexible installation.
应用场景：EUV lithography, MEMS, CD line width measurement, SEM/TEM, electron microscopy, nano-technology, XPS.
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