EBARA EMT 涡轮分子泵
EMT
EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump.
广西科米瑞实验仪器设备有限公司提供 Ebara EMT 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
产品说明：EMT is a 5-axis magnetically levitated, hydrocarbon-free vacuum pump.
主要特点：Ultra-high vacuum, radiation resistant or with PK board inside, completely hydrocarbon-free, flexible installation.
应用场景：EUV lithography, MEMS, CD line width measurement, SEM/TEM, electron microscopy, nano-technology, XPS.
规格
| 型号 | EMT397M; EMT427M; EMT907M; EMT1307M; EMT2400M |
|---|---|
| 泵速 | 340-2,400 l/sec |
| 应用范围 | light harsh |
| 适用行业 | Analytical Instruments; Chemical Industry; General Vacuum; LED Manufacturing; Photovoltaic; R & D; Semiconductors |
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