EBARA ESR 干式真空泵
ESR
ESR is described for medium to harsh applications with low ultimate pressure。variable pumping speeds support flexible usage.
广西科米瑞实验仪器设备有限公司生产销售 Ebara ESR,可提供产品参数、报价和售后服务咨询,价格面议。
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产品说明:ESR is described for medium to harsh applications with low ultimate pressure; variable pumping speeds support flexible usage.
主要特点:High corrosion resistance, high flexibility, nickel resistant, low cost of ownership, low noise level, low vibration.
应用场景:PVD, ashing, sputtering, ion implant, etching, SEM, WF, CVD.
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