EBARA ESR 干式真空泵
ESR
ESR is described for medium to harsh applications with low ultimate pressure。variable pumping speeds support flexible usage.
广西科米瑞实验仪器设备有限公司提供 Ebara ESR 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
产品说明：ESR is described for medium to harsh applications with low ultimate pressure; variable pumping speeds support flexible usage.
主要特点：High corrosion resistance, high flexibility, nickel resistant, low cost of ownership, low noise level, low vibration.
应用场景：PVD, ashing, sputtering, ion implant, etching, SEM, WF, CVD.
规格
| 型号 | ESR20N; ESR30; ESR80WN; ESR100WN; ESR200WN; ESR300WN; ESR500WN |
|---|---|
| 泵速 | 2,000-46,000 l/min |
| 应用范围 | light harsh |
| 适用行业 | General Vacuum; Photovoltaic; Semiconductors |
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