EBARA EST 干式真空泵
EST
EST qualifies for harsh applications generating reactive chemical by-products and manages large gas loads and enhanced powdery by-products.
广西科米瑞实验仪器设备有限公司生产销售 Ebara EST,可提供产品参数、报价和售后服务咨询,价格面议。
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产品说明:EST qualifies for harsh applications generating reactive chemical by-products and manages large gas loads and enhanced powdery by-products.
主要特点:Manage hot gas temperature, high gas load stability, flexible gas throughput.
应用场景:ALD, RTP, LPCVD, HDP-CVD, SACVD, MOCVD, PECVD.
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