EBARA EST 干式真空泵
EST
EST qualifies for harsh applications generating reactive chemical by-products and manages large gas loads and enhanced powdery by-products.
广西科米瑞实验仪器设备有限公司提供 Ebara EST 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
产品说明：EST qualifies for harsh applications generating reactive chemical by-products and manages large gas loads and enhanced powdery by-products.
主要特点：Manage hot gas temperature, high gas load stability, flexible gas throughput.
应用场景：ALD, RTP, LPCVD, HDP-CVD, SACVD, MOCVD, PECVD.
规格
| 型号 | EST10N; EST25N; EST100WN; EST200WN; EST300WN; EST500WN |
|---|---|
| 泵速 | 1,000-50,000 l/min |
| 应用范围 | light harsh |
| 适用行业 | Chemical Industry; General Vacuum; Photovoltaic; Semiconductors |
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