EVG ® 7200

Automated SmartNIL ® UV Nanoimprint Lithography System

Full-field UV Nanoimprint Lithography system up to 200 mm utilizing flexible stamps, featuring EVG´s proprietary SmartNIL ® technology

The EVG7200 system leverages EVG's innovative SmartNIL technology enabling manufacturing of micro- and nanostructures with high pattern fidelity and low residual layer. Exposure with tunable intensity is based on LED lamps. The system is capable to quickly solidify a large variety of UV-curable materials improving consequently the throughput. A high yield is obtained by a controlled and smooth demolding supported by a force measurement. Capable of printing nanostructures over a large area with unmatched throughput and low cost of ownership, the EVG7200 system with SmartNIL technology is ideally suited for volume production of next-generation microfluidic and photonic devices, such as diffractive optical elements (DOEs).

*resolution dependent on process and template.

Features

Volume-proven imprinting technology with superior replication fidelity

Proprietary SmartNIL® technology with multiple-use polymer stamp technology

Integrated imprinting, UV curing demolding, and working stamp fabrication

Available in manual or automated configuration

Automated cassette-to-cassette handling plus semi-automated R&D mode

Substrate size from pieces to 200 mm

Chuck with heating function

Optional top-side alignment

Optional mini-environment

Open platform for all commercially available imprint materials

Scalability from R&D to production

System housing for best process stability and reliability