HERCULES ® NIL

Fully Integrated SmartNIL ® UV-NIL Systems

EVG's HERCULES ® NIL 产品系列

HERCULES ® NIL fully integrated SmartNIL ® UV-NIL system up to 200 mm

Integrated platform for pilot line and high-volume manufacturing with SmartNIL ® up to 200 mm

The HERCULES NIL 200mm is the industry standard for nanoimprint lithography in high volume manufacturing. Based on a modular platform, the HERCULES NIL combines EVG’s proprietary SmartNIL imprinting technology with cleaning, resist coating and baking pre-processing steps. The configuration is tunable and adjusted to provide at low cost the best throughput with low footprint. The Hercules NIL is equipped with the state of the art handling systems for most efficient processing on a 200mm platform.

To optimize the process chain, the fabrication of multiple-use soft stamps – which are a cornerstone for high-volume production – is included in the HERCULES NIL without requiring additional imprint stamp manufacturing equipment. The system supports the production of a variety of devices and applications, including optical devices for augmented/virtual reality (AR/VR) headsets, 3D sensors, bio-medical devices, nanophotonics, plasmonics and metasurfaces. By providing a complete NIL solution for high-volume manufacturing, the HERCULES NIL strengthens EVG’s leadership position in full-area NIL equipment solutions.

Features

Volume-proven imprinting technology with superior replication fidelity

Combines pre-processing (clean / coat / bake / chill) and SmartNIL®

Up to 4 pre-processing modules

Wafer sizes up to 200mm

Fully automated imprinting and controlled low-force detachment for maximum working stamp reusability

Fully recipe-controlled processing

Volume manufacturing of structures down to 40 nm* and smaller

Optional chuck with heating function

Optional mini-environment

Includes working stamp manufacturing capability

Fastest curing times due to high-power light source