FLEXion 200/400, FLEXion 400-SiC
FLEXion 200/400, FLEXion 400-SiC
Medium current production implanter for:。RF and power devices, sensors, opto-electronics manufacturing
广西科米瑞实验仪器设备有限公司生产销售 Ion Beam Services FLEXion 200/400, FLEXion 400-SiC，可提供产品参数、报价和售后服务咨询，价格面议。
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Medium current production implanter for:
RF and power devices, sensors, opto-electronics manufacturing
on Si, SiC, GaAs, GaN, LiTaO3
, HgCdTe, LiNbO3
, InP…
FLEXion 200/400, FLEXion 400-SiC
To fulfill manufacturer’s needs for compound Semiconductors
and SiC components, IBS has designed a family of implanters avoiding
the costly complexity of a 300 mm Si machine downgraded for SiC.
High beam current
Extended life ion source ( >300 hrs)
Enhanced single or
multi-charged Al
beam generation
High resolution
analyzer magnet for multi-charged and high AMU beams
650 °C
fast temperature ramp-up/ramp-down platen for SiC
Optimized throughput for
non Si materials
Quad implant, autotune up to 10 chained implantations
From coupons to 200 mm, parallel scanning for 200 mm wafers
Up to 1.2 MeV
High efficiency ion sources (Indirect heated Cathode, ECR)
Up to 8 different implant gases
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