Mad City Labs Nano-Align5 Series

产品说明: The Nano-Align5 is a five axis (X, Y, Z, θ X , θ Y ) piezo nanopositioning system with a large center aperture. The Nano-Align5 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with “tip” and “tilt” (θ X θ Y ). The large center aperture provides excellent access for microscopy optics, sample Nano-Align5 constructed from aluminum. holders, and probe placement. The Nano-Align5 includes internal sensors with proprietary PicoQ ® technology for absolute position measurement and picometer/ nanoradian accuracy under closed loop control. The Nano-Align5 can be combined with the MicroStage and Manual MicroStage for long range micropositioning.

产品特点: Low profile piezo nanopositioner Five axis motion (XYZ θ X θ Y ) 100 μm, 200 μm, or 300 μm motion in XYZ Up to 3.3mrad motion in θ X , and up to 4.5 mrad motion in θ Y Center aperture: 2.6" x 2.6" Closed loop control

典型应用: Alignment MEMS Nanolithography Metrology

技术规格: Ranges of motion (Nano-Align5-100) 100 x 100 x 100 μm x 1.1 mrad (θ X ) x 1.5 mrad (θ Y ) Ranges of motion (Nano-Align5-200) 200 x 200 x 200 μm x 2.3 mrad (θ X ) x 3.0 mrad (θ Y ) Ranges of motion (Nano-Align5-300) 300 x 300 x 300 μm x 3.3 mrad (θ X ) x 4.5 mrad (θ Y ) Resolution (Nano-Align5-100) 0.2 nm (XYZ)