Mad City Labs Nano-Align6 Series

产品说明: The Nano-Align6 is a six axis (X, Y, Z, θ X , θ Y , θ Z ) piezo nanopositioning system with a large center aperture. The Nano-Align6 is ideal for alignment applications which require three linear axes of motion (X, Y, Z) combined with rotational motion about each axis. The large aperture provides excellent access for microscopy optics, sample holders, and probe placement. The Nano-Align6 includes internal sensors on every axis using Mad City Labs’ proprietary PicoQ ® technology for absolute position measurement and picometer/nanoradian accuracy under closed loop control.

产品特点: Low profile piezo nanopositioner Six axis motion (XYZ θ X θ Y θ Z ) 100 μm x 100 μm x 100 μm x 1.1 mrad x 1.5 mrad x 5 mrad ranges of motion 200 μm x 200 μm x 200 μm x 2.3 mrad x 3.0 mrad x 5 mrad ranges of motion Center aperture: 35mm diameter Closed loop control

典型应用: Alignment MEMS Nanolithography Metrology

技术规格: Ranges of motion (Nano-Align6-100) 100 x 100 x 100 μm x 1.1 mrad (θ X ) x 1.5 mrad (θ Y ) x 5 mrad (θ Z ) Ranges of motion (Nano-Align6-200) 200 x 200 x 200 μm x 2.3 mrad (θ X ) x 3.0 mrad (θ Y ) x 5 mrad (θ Z ) Resolution (Nano-Align6-100) 0.2 nm (XYZ), 2.2 nrad (θ X ), 3.0 nrad (θ Y ), 10 nrad (θ Z ) Resolution (Nano-Align6-200) 0.4 nm (XYZ), 4.6 nrad (θ X ), 6.0 nrad (θ Y ), 10 nrad (θ Z