Mad City Labs Nano-M3Z
Nano-M3Z
Mad City Labs Nano-M3Z, 控制器. 页面列出的重点包括: Compact piezo nanopositioner Three axis motion (Z θ X θ Y ) Low profile: 0.76" Closed loop control
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说明
产品说明: The Nano-M3Z is a compact, three axis (Z, θ X , θ Y ) piezo nanopositioning system constructed from Aluminum. The compact design of the Nano-M3Z allows it to be integrated into existing instrumentation where space is restricted. The Nano-M3Z is ideal for demanding applications which require precise alignment capabilities. Internal position sensors utilizing proprietary PicoQ ® technology provide absolute, repeatable position measurement with picometer and nanoradian accuracy under closed loop control. A related model, the Nano-Man5 , incorporates linear X and Y motion to the capabilities of the Nano-M3Z.
产品特点: Compact piezo nanopositioner Three axis motion (Z θ X θ Y ) Low profile: 0.76" Closed loop control
典型应用: Z-axis plus tip/tilt alignment Nanolithography Metrology Nano-alignment
技术规格: Range of motion (Z) 50 μm Range of motion (θ X ) 3 mradian Range of motion (θ Y ) 3 mradian Resolution (Z) 0.1 nm Resolution (θ X ) 6 nradian Resolution (θ Y ) 6 nradian Resonant Frequency 100 Hz ±20% Stiffness 1.0 N/μm Recommended max. load (horizontal)* 0.2 kg Recommended max. load (vertical)* 0.05 kg Body Material Aluminum Controller Nano-Drive ® * Larger load requirements should be discussed with our engineering staff. Nano-M3Z Nano-M3Z Nano-M250 Nano-M350 Nano-Man5 Nano-MZ Nano-Align3 Series
规格
| 型号 | Nano-M3Z |
|---|---|
| 产品特点 | Compact piezo nanopositioner Three axis motion (Z θ X θ Y ) Low profile: 0.76" Closed loop control |
| 典型应用 | Z-axis plus tip/tilt alignment Nanolithography Metrology Nano-alignment |
| 技术规格 | Range of motion (Z) 50 μm Range of motion (θ X ) 3 mradian Range of motion (θ Y ) 3 mradian Resolution (Z) 0.1 nm Resolution (θ X ) 6 nradian Resolution (θ Y ) 6 nradian Resonant Frequency 100 Hz ±20% Stiffness 1.0 N/μm Recommended max. load (horizon |
| 控制方式 | Closed loop control |
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