TRM250

TRM250 is a thermoreflectance microscope that detects the change in the reflectivity of the target sample image, which is related to the temperature. The highly sensitive microscope measures the reflectivity changes by the biasing current or voltage, and it is interpreted as the thermal distribution due to this biasing source. It provides a microscopic-resolution thermal image to analyze how the electric circuits react to the thermal input.

Principles

The fundamental principle of thermo-reflectance microscopy is based on the physical phenomenon that the optical reflectivity changes with the temperature of the target. By this principle, the temperature is indirectly measured by measuring the optical reflectivity by the microscope. As the microscope is used for imaging, it can provide the sub-micrometer resolution of the thermal imaging, which is very challenging to get from other thermal imaging devices such as an IR camera.

Features & Benefits

- Thermoreflectance microscope

- Dedicated probe station with multi-axis stages

- Thermoreflectance image with various wavelengths of the light source

- Dedicated high-speed heating/cooling device

- Transient thermal analysis imaging

- Customizing setup available

Thermoelectric heating vacuum plate >

Getting the target sample's reference images at specific temperatures is necessary to interpret the thermoreflectance image to the actual temperature information. For this purpose, the thermoelectric heating vacuum plate is provided with TRM250. It uses a Peltier device and cooling fin structure for fast and accurate temperature control, and the software controls the heating/cooling temperature. In the center of the heating plate is a hole for vacuum suction, which is to fix the target sample by vacuum. A temperature sensor is embedded in the heating plate to monitor the temperature.

Transient thermal analysis

The reflectivity change at specific instances can be measured accurately by precise and timely control of the pulsed light source and imaging devices. It provides information on how the temperature changes with time change. This transient thermal response is a unique characteristic available by the thermoreflectance microscope.

10 μs

30 μs

50 μs

70 μs

100 μs

Software

TRM250 operation software for thermo-reflectance imaging

TRM250 operation software for transient thermo-reflectance imaging & analysis