FZ-14M/FZ-14MG
FZ-14M/FZ-14MG
Crystal Growth。FZ-14M。Contactless Monocrystal Growth for Material Evaluation。Small polycrystalline samples from the production process are inductively melted in an argon atmosph
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说明
Crystal Growth
FZ-14M
Contactless Monocrystal Growth for Material Evaluation
Small polycrystalline samples from the production process are inductively melted in an argon atmosphere and crystallized on a seed into a monocrystal. This is then analyzed using spectrometric methods. This allows the quality of the produced polysilicon to be determined and documented. Due to contactless melting – the high ultimate vacuum generated by a turbomolecular pump and the use of ultra-pure argon as the process atmosphere – contamination during the process is effectively prevented.
In the FZ-14MG version, silicon granulate can be placed below the coil and, using a seed crystal at the upper feed, monocrystals for material analysis can be pulled in a process with reversed pulling direction. For this purpose, the upper spindle can be moved in both X and Y directions.
Main features
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规格
| Model / product family | FZ-14M/FZ-14MG |
|---|---|
| 产品类别 | Crystal Growth / Float Zone |
| Crystal pulling length | 350 mm |
| Crystal diameter | up to 25 mm |
| Final vacuum | 2.5 x 10 -5 mbar |
| Max. overpressure | 2 bar (g) |
| Technical data set 2 - Height | 3,000 mm |
| Technical data set 2 - Width | 1,020 mm |
| Technical data set 2 - Depth | 1,640 mm |
| Technical data set 2 - Footprint (total) | 1,800 mm x 4,000 mm |
| Technical data set 2 - Weight (total) | Approx. 2,500 kg |
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