GIGAbatch 310M
GIGAbatch 310M
Plasma Surface Treatment。Compact table-top design。Economic price level。Versatility in substrate sizes (2" to 6")
广西科米瑞实验仪器设备有限公司提供 PVA TePla GIGAbatch 310M 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
Plasma Surface Treatment
Plasma Frontend
Compact table-top design
Economic price level
Versatility in substrate sizes (2" to 6")
Batch processing (Up to 25 wafers per run)
Custom wafer boat support arms (optional)
Manual drawer door
Microwave plasma source
Fast ash rate & damage-free process
Broad substrate compatibility
Interested in GIGAbatch 310M
规格
| Model / product family | GIGAbatch 310M |
|---|---|
| 产品类别 | Plasma Surface Treatment / Plasma Frontend |
| Frequency | 2.45 GHz |
| 功率 | 0-600 W |
| Electrical conn. | 230 V, 15 A, 50/60 Hz |
| Vacuum chamber | Quartz, diameter 245 mm, depth 395 mm, volume 18 l |
| Dimensions (w/h/d) | Approx. 795 x 660 x 710 mm |
| 重量 | 150 kg |
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