GIGAbatch 360/380M
GIGAbatch 360/380M
Plasma Surface Treatment。Designed for production applications。Very low cost of ownership
广西科米瑞实验仪器设备有限公司提供 PVA TePla GIGAbatch 360/380M 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
Plasma Surface Treatment
Plasma Frontend
Compact design
Designed for production applications
Very low cost of ownership
Cleanroom-qualified glass front
Versatile substrate handling (2" to 8")
High throughput (up to 75 wafers per run)
Custom wafer support arms included
Motorized door for wafer loading
No contact with plasma chamber during loading
Also available on request
An active control device for the process pressure (DSC)
A Faraday cage
Additional gas ducts
Loading devices for different-sized substrates or wafers
A ceramic process chamber
Special seals for operation with process gas containing fluorine
Interested in GIGAbatch 360 / 380M
规格
| Model / product family | GIGAbatch 360/380M |
|---|---|
| 产品类别 | Plasma Surface Treatment / Plasma Frontend / Gigabatch 360 |
| Frequency | 2.45 GHz |
| 功率 | 0-1,000 W |
| Electrical conn. | 230 V, 15 A, 50/60 Hz |
| Vacuum chamber | Quartz, depth 395 mm |
| Vacuum chamber 360M | Diameter 245 mm, volume 18 l |
| Vacuum chamber 380M | Diameter 300 mm, volume 28 l |
| Dimensions (w/h/d) | Approx. 795 x 1,540 x 710 mm |
| 重量 | 190 kg |
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