SiCma
SiCma
Physical Vapor Transport。High-quality mass production up to 12''。High repeatability
广西科米瑞实验仪器设备有限公司提供 PVA TePla SiCma 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
Crystal Growth
Physical Vapor Transport
Key Features
High-quality mass production up to 12''
Compact design
High repeatability
High-quality standard for maximum yield
Advanced automation
Flexible loading and unloading systems
Modular options such as turbo pump and various measurement devices
SiCma thus offers an ideal platform for the growth of silicon carbide and aluminum nitride in demanding production environments and can be individually adapted to specific requirements.
Main features
Additional Options
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Interested in PVT systems
规格
| Model / product family | SiCma |
|---|---|
| 产品类别 | Crystal Growth / Physical Vapor Transport |
| Typical crystal diameters | Up to 12" |
| Frequency | 6 - 10 kHz |
| Footprint [W x D] | 1,200 x 2,500 mm |
| Height incl. signal lamp | <3,500 mm |
| Total weight approx. | 1,850 kg |
| Working pressure | 1 - 900 mbar |
| Working temperature max. | 2,400 °C |
| Materials | 3C-SiC; 4H-SiC; 6H-SiC, AlN; … |
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