SiCma
Physical Vapor Transport。High-quality mass production up to 12''。High repeatability
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Crystal Growth
Physical Vapor Transport
Key Features
High-quality mass production up to 12''
Compact design
High repeatability
High-quality standard for maximum yield
Advanced automation
Flexible loading and unloading systems
Modular options such as turbo pump and various measurement devices
SiCma thus offers an ideal platform for the growth of silicon carbide and aluminum nitride in demanding production environments and can be individually adapted to specific requirements.
Main features
Additional Options
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Interested in PVT systems
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