VEreveal
VEreveal
Thin Film Inspection。One system replaces many。Inline inspection system built for semiconductor fab environments (ISO class 3)
广西科米瑞实验仪器设备有限公司提供 PVA TePla VEreveal 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
Thin Film Inspection
One system replaces many
Inline inspection system built for semiconductor fab environments (ISO class 3)
Available for macro inspection (macro), micro inspection (micro), or both combined (fusion)
Near real-time acquisition and evaluation, designed for continuous production monitoring
Full-surface (100%) wafer inspection in a single run
Replaces multiple measurement methods: eliminates the need for separate FT-IR, SEM, LIBS, X-ray, or AFM measurements
Spatial resolution from 300 µm (macro) down to sub-micron (micro)
Supports wafer sizes up to 300 mm
Certified to SEMI S2, S8, and S14 standards
Versatile customization options
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规格
| Model / product family | VEreveal |
|---|---|
| 产品类别 | Thin Film Inspection |
| Measurement mode | Reflectance |
| Measurement time | < 10 s (typical) |
| Wavelength range | VNIR: 400-1,000 nm | SWIR: 900 – 1,700 nm |
| Spectral resolution | VNIR: 1.34 nm | SWIR: 3.5 nm |
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