Wafer Surface Preparation System
Vapor Phase Decomposition。Features at a glance。Layout for maximum robustness against cross-contamination.
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Wafer Inspection
Vapor Phase Decomposition
Features at a glance
Layout for maximum robustness against cross-contamination.
Depending on requirements, a highly automated workflow of the entire process chain under cleanroom conditions is possible, utilizing loading stations, handling robots, intermediate storage devices, and media supply systems.
Centralized control of the entire system, from job management and recipe definition to the recording of all data.
Remote access for control and monitoring purposes is available.
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