Raith VECTOR - AI-powered inspection and metrology

：Introduction

：Key features

：Ultra precise navigation over full wafers and dies

：1 nm resolution due to laser interferometric stage positioning measurements

：Fully automated acquisition of 10.000s real POIs (images and/or measurement points) on full wafers

：KLA result file import for automated defect review

：Integrated image evaluation capabilities and graphical display of results linked to a comprehensive database

：Highest stability due to a temperature controlled environmental shield

：Accurate full FOV (field of view) measurements due to non-linear in-field distortion corrections

：CAD-navigation on wafers and dies

：Connectivity solutions with RAITH’s nanofabrication tools

：Taking SEM measurements to the next level

：Automated workflows without user influence

：Precision guaranteed

：Enhanced positioning accuracy

：Connectivity

：Positioning

：3-in-1 solution for characterization and verification of nanostructuring processes

：Streamlined metrology analysis

：Software

：Creating information out of data

：Configurable analysis capabilities

：Python scripting

：Technical data