Raith VELION - Multi ion species FIB‑SEM
VELION
Unique multi-ion-species FIB technology (IonSelect)。:Vertically mounted FIB column and horizontal 4-inch laser interferometer stage
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:Introduction
:Key features
:Unique multi-ion-species FIB technology (IonSelect)
:Vertically mounted FIB column and horizontal 4-inch laser interferometer stage
:Large-area FIB patterning capabilities on a true lithography platform
:Automated, stable nanofabrication over several days
:Ga-free TEM sample preparation
:Ion microscopy and imaging with light ions
:Easy, fast and reliable ion imaging, 3D sample reconstruction without stage tilt
:Sample analysis & in-situ process monitoring enabled by tailored SEM column
:It’s all about FIB in perfection
:Multi ion species FIB technology
:Cutting edge FIB performance
:Unmatched large area FIB patterning
:Stable nanofabrication over extended periods
:Motion
:Positioning
:Select
:Software
:Accessible professional lithography: Ergonomic interface for all users
:Single software platform
:Control with digital column
:Flexible mark recognition and automation
:Python scripting
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