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scia Coat 500

scia Coat 500

Products Ion Beam Etching Ion Beam Trimming Ion Beam Sputtering scia Cluster 200 more...

品牌: scia Systems价格: 面议服务区域: 全国

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scia Coat 500

Products Ion Beam Etching Ion Beam Trimming Ion Beam Sputtering scia Cluster 200 more...

Ion Beam Etching

Ion Beam Trimming

Ion Beam Sputtering

scia Cluster 200

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Large Area Multilayer Deposition

The scia Coat 500 is used for homogeneous coating of large substrates for precision optics. Recipe controlled deposition processes allow a repeatable quality of multilayer stacks. Thereby, a changeable shaper system (up to 4 shapers) compensates parameter and/or material dependent inhomogeneity effects and enables the deposition of defined gradient films.

Features & Benefits

Excellent uniformity due to linear movement

Up to 6 water-cooled target materials on a rotational holder for in-situ change

Recipe controlled multilayer deposition with quartz crystal oscillator and/or optical thickness monitor (OTM)

Controlled movement of linear axis system for gradient coating or surface error correction

Optional substrate heating up to 250 °C to optimize film stress

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Applications

X-ray reflectivity measurement and fitting curve of a [C+Ni]80-multilayer stack. Visibility of 4th order Bragg peak shows the excellent repeatability of single layer thicknesses.

Multilayer films for optical filters, X-ray mirrors and synchrotron mirrors

Optical coatings for high- and anti-reflective and dielectric layers

Deposition of films with property gradients (Göbel mirrors)

Ion beam smoothing

One-dimensional ion beam figuring

Application Note

Dielectric Coatings on large substrates

High- and Anti-Reflective Coatings with Ta 2 O 5 and SiO 2

Principle

Primary source sputters material from a target to the face-down oriented substrate

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