中文English
科米瑞
首页联系我们
  1. 首页
  2. 产品中心
  3. 产品详情
科米瑞

© Copyright 科米瑞 2026

产品中心产品目录应用领域知识中心常见问题联系我们隐私政策桂ICP备2020008265号-5
广西科米瑞实验仪器设备有限公司13422079856122816084@qq.com
分析检测仪器生命科学仪器显微成像与光学样品前处理温控加热与制冷真空泵阀与流体科米瑞仪器应用领域实验室仪器选型

scia Inline 400

scia Inline 400

Products Ion Beam Etching Ion Beam Trimming Ion Beam Sputtering scia Cluster 200 more...

品牌: scia Systems价格: 面议服务区域: 全国

广西科米瑞实验仪器设备有限公司提供 scia Systems scia Inline 400 产品资料、选型咨询、供货报价和售后服务支持,价格面议。

立即询价查看更多详情咨询该型号
← 返回产品列表
scia Inline 400
说明规格FAQ

说明

Products Ion Beam Etching Ion Beam Trimming Ion Beam Sputtering scia Cluster 200 more...

Ion Beam Etching

Ion Beam Trimming

Ion Beam Sputtering

scia Cluster 200

Technologies

Applications Application Notes White Paper Publications Research Projects Learning

Application Notes

White Paper

Publications

Research Projects

Learning

Company About us News Events

About us

Contact Head Office Worldwide Visit us

Head Office

Worldwide

Visit us

scia-jobs.de

Ultra-Sharp Edges for Blades

The scia Inline 400 was designed for shaping the edges of high-quality blades - using ion beam etching and magnetron sputtering . The basic configuration of the system consists of two process units: The first one is equipped with an ion beam source for deburring and pre-cleaning of the blades. In the second process chamber opposite magnetron sputter sources are installed to coat both sides of the substrates simultaneously. The inline concept with two load locks enables a fast loading and unloading procedure, which results in a very high throughput. Furthermore, the modular design allows easy upgrading with additional process chambers as well as integration into existing production lines.

Features & Benefits

Deburring station for ultra-sharp substrate edges

Carrier-based handling to address various substrate dimensions

Vertical layout enables double-sided processing for extreme high throughput in volume production

Inline arrangement with multiple process chambers and roller track transport system

Two load-locks for fast loading and unloading procedure, thus increased throughput

Need more Information? Contact us!

Applications

Tip shaping of cutter blades realized by ion beam etching. Left: Unsharpened blade with strong burr, Right: Optimized blade with smoothed

surface for better coating adhesion.

Tip shaping of razor blades, microtome blades or sharp medical tools (syringes) for a durable coating adhesion

Coating of adhesive and/or functional layers on razor blades and microtome blades

Principle

Inline arrangement with linear substrate movement

Chamber one with ion beam sources for pre-cleaning

Chamber two with magnetrons for double-sided coating of the substrates

Ion Beam Etching (IBE) / Ion Beam Milling (IBM) uses a collimated beam of inert gas ions for material removal.

Magnetron Sputtering utilizes plasma ion bombardment on a target to deposit thin films on the substrate surface.

Detailled Information

提交需求

请填写必填信息,我们将在工作日尽快回复。

规格

型号scia Inline 400
Product categoryCustomized Systems
Substrate size (up to)Individual sizes loaded on carrier, carrier size up to 450 mm x 400 mm
Ion beam sourceTwo 380 mm linear microwave ECR sources (LIN380-e)
Sputter sourceTwo rotatable magnetrons with 680 mm length
Throughput12 Carrier/h ≈ up to 500,000 blades/h
Base pressure< 1 x 10 -6 mbar
System dimension (W x D x H)6.10 m x 1.60 m x 1.95 m, for 2 process chambers (without electrical rack)
ConfigurationsInline system with several etching and coating chambers, roller track transport system, 2 load locks and 2 atmospheric stations for loading and unloading
Software interfacesSECS II / GEM, OPC
Typical deposition rateSiO 2 : 85 nm x mm/s (dynamic rate)
Uniformity variation≤ 10 % (σ/mean)

FAQ