scia Magna 400
Products Ion Beam Etching Ion Beam Trimming Ion Beam Sputtering scia Cluster 200 more...
广西科米瑞实验仪器设备有限公司生产销售 scia Systems scia Magna 400,可提供产品参数、报价和售后服务咨询,价格面议。
← 返回产品列表
Products Ion Beam Etching Ion Beam Trimming Ion Beam Sputtering scia Cluster 200 more...
Ion Beam Etching
Ion Beam Trimming
Ion Beam Sputtering
scia Cluster 200
Technologies
Applications Application Notes White Paper Publications Research Projects Learning
Application Notes
White Paper
Publications
Research Projects
Learning
Company About us News Events
About us
Contact Head Office Worldwide Visit us
Head Office
Worldwide
Visit us
scia-jobs.de
Multilayer Coatings for Optical Substrates
The scia Magna series includes advanced magnetron sputtering systems designed for high-precision multilayer coatings on optical substrates, achieving (sub-)nanometer accuracy. Each system can be equipped with up to six magnetrons, allowing the deposition of complex multilayer stacks from different target materials without the need to break vacuum. The systems support the deposition of metal, oxide, and nitride layers with equal efficiency.
Equipped with automated substrate handling, the scia Magna 400 Inline , scia Magna 500 Inline , scia Magna 700 Inline and scia Magna 1200 Inline enable fully automated, recipe-driven processing. Precise, position-controlled substrate motion enables defined gradient layers and superior deposition uniformity.
Features & Benefits
Multilayer coating with inline arrangement of multiple process sources
Uniform or gradient films on optical substrates by synchronized linear movement and spin rotation
Up to 6 magnetron sputter sources
Optional surface treatment by ion source or additional ion beam source
Vertical substrate orientation for minimized particle load
Need more Information? Contact us!
Applications
Alternating stack of (Si/Mo) 23 for Bragg mirror. The results show very reproducible thicknesses of each period.
Gradient multilayer coatings of mirrors for EUV
Multilayer stacks for X-ray mirrors for beam line and analytic applications
Multilayer coating for UV and VIS optics
Principle
Inline arrangement with 6 magnetron sputter sources
Linear substrate movement past magnetrons and superimposed substrate rotation
Magnetron Sputtering utilizes plasma ion bombardment on a target to deposit thin films on the substrate surface.
Detailled Information
Substrate size (up to)
请填写必填信息,我们将在工作日尽快回复。