Quest
Precision Control of Layer Endpoints Results in Improved Repeatability and Exceptional Process Control
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:Veeco’s Quest Broadband Optical Monitor provides non-quarterwave control directly on production substrates. Multiple algorithm choices and selectable wavelength ranges allow control of leading-edge optical designs.
:Up to 10x improvement in layer thickness control compared to previous generations
:Increased production utilization through reduction in calibration runs
:Less than 0.1 percent repeatability even with non-consecutive runs
:Easy set-up with user-friendly interface
:Fully integrates into existing SPECTOR and SPECTOR-HT IBD systems
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