SPECTOR Large Area Ion Beam Deposition System for Optical Coating
Increased Throughput and Excellent Material Uniformity。：Veeco’s SPECTOR® Large Area Planetary Ion Beam Deposition System combines unsurpassed ion beam film quality with batch siz
广西科米瑞实验仪器设备有限公司提供 Veeco SPECTOR Large Area Ion Beam Deposition System for Optical Coating 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
← 返回产品列表：Increased Throughput and Excellent Material Uniformity
：Veeco’s SPECTOR® Large Area Planetary Ion Beam Deposition System combines unsurpassed ion beam film quality with batch sizes near that of e-beam systems. In addition to a larger overall coating area, the robust fixture supports processing monolithic substrates up to 400mm in diameter and 100mm thick. Veeco has included our 16cm RF high-power deposition source and ultra-low contamination RF neutralizers to ensure high deposition rates and film quality. For maximum stoichiometry control and in-situ substrate pre-cleaning or etch support, the system is also equipped with our 12cm RF assist ion source.
：Ion beam quality with industry-leading throughput provides the lowest cost of ownership
：Exceptional material uniformity across 400mm planets ensures maximum product yield
：High current RF ion sources provide excellent deposition rates
：Maximum product flexibility provided by large substrate and palette support
| 型号 | SPECTOR Large Area Ion Beam Deposition System for Optical Coating |
|---|---|
| 产品类别 | Ion Beam Deposition System |
| Wafer size | up to 400mm in diameter and 100mm thick |
| Application | RF high-power deposition source and ultra-low contamination RF neutralizers to ensure high deposition |
| Technology | Ion Beam Deposition System combines unsurpassed ion beam film quality with batch sizes near that of e-beam systems |
请填写必填信息，我们将在工作日尽快回复。