FemtoLAB 一体化激光微加工研发平台
FemtoLAB
FemtoLAB 是用于激光微加工的一体化研发平台，可升级、灵活并可定制，面向实验室和研发中心。
广西科米瑞实验仪器设备有限公司提供 Workshop of Photonics FemtoLAB 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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说明
FemtoLAB 是用于激光微加工的一体化研发平台，可升级、灵活并可定制，面向实验室和研发中心。
规格参数
- Model or series：FemtoLAB
- < ;D platform
- Recommended materials：All materials: glass, sapphire, silicon, ceramics, metal, plastic, optical fibers etc.
- Laser：High power ultrashort pulse IR, Green, UV laser
- Optical path selection：Automated
- Samples size：Compatible with up to 160 mm x 160 mm designs
- Smallest feature size：200 nm
- Positioning system：XYZ mechanical axes, positioning accuracy +- 0.3 μm featuring continuous wafer level patterning
- Scanning system：Galvo system for all laser wavelengths
- Vision：Real-time visualization and positioning camera with feature recognition
- Metrology：Integrated microscope
- Sample handling：Manual with automatic alignment
规格
| Model or series | FemtoLAB |
|---|---|
| Product category | All-in-one femtosecond laser micromachining R&D platform |
| Recommended materials | All materials: glass, sapphire, silicon, ceramics, metal, plastic, optical fibers etc. |
| Laser | High power ultrashort pulse IR, Green, UV laser |
| Optical path selection | Automated |
| Samples size | Compatible with up to 160 mm x 160 mm designs |
| Smallest feature size | 200 nm |
| Positioning system | XYZ mechanical axes, positioning accuracy +- 0.3 μm featuring continuous wafer level patterning |
| Scanning system | Galvo system for all laser wavelengths |
| Vision | Real-time visualization and positioning camera with feature recognition |
| Metrology | Integrated microscope |
| Sample handling | Manual with automatic alignment |
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