FemtoTGV
FemtoTGV 是针对通孔玻璃 TGV 制备优化的激光微加工工作站。在玻璃芯基板 TGV 加工中,常用方法是激光加工结合湿法刻蚀,FemtoTGV 负责其中的激光加工部分
广西科米瑞实验仪器设备有限公司提供 Workshop of Photonics FemtoTGV 产品资料、选型咨询、供货报价和售后服务支持,价格面议。
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FemtoTGV 是针对通孔玻璃 TGV 制备优化的激光微加工工作站。
在玻璃芯基板 TGV 加工中,常用方法是激光加工结合湿法刻蚀,FemtoTGV 负责其中的激光加工部分。
WOP 已开发适合多种玻璃类型、高深宽比通孔玻璃、不同通孔形貌和不同刻蚀能力的工艺技术与设备。
| Model or series | FemtoTGV |
|---|---|
| Product category | Through Glass Vias (TGV) laser micromachining workstation |
| Glass compatibility | BF33, D263t, EXG, SG 7.8 , SG 3.4, EN-1A, OA-11 |
| Laser | High power ultrashort pulse IR |
| Optical beam delivery | WOP patented optical beam delivery engine |
| Samples size | Laboratory: up to 300×300 mm Industrial: up to 600×600 mm |
| Positioning system | XYZ mechanical axes, positioning accuracy ±0.5 μm featuring continuous wafer level patterning |
| Vision | Real-time visualization and positioning camera with feature recognition |
| Metrology | Compactable with AOI |
| Sample handling | Manual | semi automatic | automatic |
| Optical pulse detection function | Miss fire detection or Low energy detection |
| Fume extraction system | Included |
| Accessories | Power control, polarization state control |
| Software | Entire system control via single GUI developed by WOP |
| Supported file formats | – 2D/3D model import: STL, DXF, DWG, AMF, PLT, FAB – Bitmap support: BMP, GIF, JPG, JPEG, PNG – Text files as a table array: TXT, RTF, TEX |
| Construction | Granite base with passive / active vibration control |
| Glass type | SINGLE SHOT: BF33, D263T, EXG, SG 7.8, SG 3.4, EN-1A, OA-11; MULTI SHOT: BF33, D263T, EXG, SG 7.8, SG 3.4, EN-1A, OA-11 |
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| Glass thickness* |
|---|
| SINGLE SHOT: up to 1,1 mm; MULTI SHOT: 0,1 – 10 mm |
| Min micro hole diameter* | SINGLE SHOT: 10 µm; MULTI SHOT: 40 µm |
|---|
| Aspect ratio* | SINGLE SHOT: up to 1:100; MULTI SHOT: up to 1:100 |
|---|
| Hole shape | SINGLE SHOT: hourglass or taperless; MULTI SHOT: hourglass or taperless |
|---|
| Processing speed | SINGLE SHOT: up to 5000 holes/sec depends on panel design; MULTI SHOT: 20 holes/sec |
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