
MicroWriter ML3 Baby Plus 直写光刻机
Conventional approaches to photolithography are usually based on exposing through a chromium-glass mask manufactured by specialist vendors. In R&D environmen...
- 型号或系列
- MicroWriter ML3 Baby Plus
- Writing area
- 149mm x 149mm maximum writing area.
- Maximum wafer size
- 155mm x 155mm x 7mm maximum wafer size.
- Minimum feature size
- 5µm minimum feature size while retaining high resolution writing for critical parts.








