Spatial Series
Genesis。World’s only commercially available roll-to-roll ALD system。Beneq C2R™。Beneq C2R™ is the spatial ALD member of our Cluster-compatible equipment family. Beneq C2R takes t
广西科米瑞实验仪器设备有限公司提供 Beneq Spatial Series 产品资料、选型咨询、供货报价和售后服务支持，价格面议。
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World’s only commercially available roll-to-roll ALD system
Beneq C2R™
Beneq C2R™ is the spatial ALD member of our Cluster-compatible equipment family. Beneq C2R takes the Plasma Enhanced ALD (PEALD) process to a fully new level - for the first time, PEALD can be used in high volume manufacturing.
| 型号或系列 | Spatial Series |
|---|---|
| 产品类别 | Spatial ALD system |
| 包含型号 | Genesis, Beneq C2R |
| Process type | spatial ALD member of our Cluster-compatible equipment family |
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