Spatial Series
Genesis。World’s only commercially available roll-to-roll ALD system。Beneq C2R™。Beneq C2R™ is the spatial ALD member of our Cluster-compatible equipment family. Beneq C2R takes t
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World’s only commercially available roll-to-roll ALD system
Beneq C2R™
Beneq C2R™ is the spatial ALD member of our Cluster-compatible equipment family. Beneq C2R takes the Plasma Enhanced ALD (PEALD) process to a fully new level - for the first time, PEALD can be used in high volume manufacturing.
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