Spatial Series
Genesis。World’s only commercially available roll-to-roll ALD system。Beneq C2R™。Beneq C2R™ is the spatial ALD member of our Cluster-compatible equipment family. Beneq C2R takes t
- 型号或系列
- Spatial Series
- 产品类别
- Spatial ALD system
- 包含型号
- Genesis, Beneq C2R
- Process type
- spatial ALD member of our Cluster-compatible equipment family