PRO Line PVD 75
Automate Your Lab.。:The Kurt J. Lesker Company ® PRO Line PVD 75 is the next generation thin film deposition system based on the workhorse PVD 75 platform. With more than 400 uni
广西科米瑞实验仪器设备有限公司提供 Kurt J. Lesker PRO Line PVD 75 产品资料、选型咨询、供货报价和售后服务支持,价格面议。
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:Automate Your Lab.
:The Kurt J. Lesker Company ® PRO Line PVD 75 is the next generation thin film deposition system based on the workhorse PVD 75 platform. With more than 400 units in service worldwide, the PVD 75 is a proven, robust, and versatile design. The PRO Line PVD 75 builds on the successes of the original design with improved system base pressures and pump down times. A technically superior chamber design, an industry best software control system with advanced programming capability, automatic substrate loading, and numerous features for optimized thin film performance are a few of the key advantages offered in this innovative, best of class design.
:PVD 75 Open Frame
:PVD 75 with Load Lock
:PVD 75 Dual Chamber
:Specifications
:Box Shaped 304L Stainless Steel Chamber
:Internal Dimensions: 15.25" Wide x 16.50" Deep x 24" High (387.4mm x 419.1mm x 609.6mm)
:Aluminum, O-Ring Sealed, Hinged, Front Access Door
:Deposition Techniques
:Thermal Evaporation
:Up To Four, 4" Individual Boats, Or Six 2" Boat Assemblies
:TORUS Magnetron Sputtering Sources
:Up To Six 2" or 3" Sources
:Up To Four 4" Sources
:Electron Beam Evaporation Source
:4 Pocket 8cc
:8 Pocket 12cc
:6 Pocket 20cc
:LTE10 Organic Deposition Sources
:Up to Two, 10cc Sources
:Deposition Orientation
| 型号 | PRO Line PVD 75 |
|---|---|
| Product category | Sputtering System |
| KL-6 Electron Beam source | 100mm Wafer / <=+/-4% |
| KL-6 Electron Beam source | 150mm Wafer / <=+/-5% |
| Thermal Evaporation Source | 100mm Wafer / <=+/-5% |
| Thermal Evaporation Source | 150mm Wafer / <=+/-5% |
| 技术规格 5 | PVD 75 with Load Lock |
| 技术规格 6 | PVD 75 Dual Chamber |
| 技术规格 7 | Box Shaped 304L Stainless Steel Chamber |
| 技术规格 8 | Internal Dimensions: 15.25" Wide x 16.50" Deep x 24" High (387.4mm x 419.1mm x 609.6mm) |
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| 技术规格 9 | Deposition Techniques |
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| 技术规格 10 | Thermal Evaporation |
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