NS-3600

NS-3600 is a high-speed confocal laser scanning microscope (CLSM) for precise and reliable 3-dimensional (3D) measurement, especially designed for the laboratory use performance. It provides three-dimensional descriptions of target objects from a series of optically sectioned images using a very straightforward algorithm, with which the cross-sectional image is directly converted to the 3D profile data. This unique raw cross-sectional image, which is intuitively interpretable, makes the surface profile data definitely superior to that from the other optical technologies

Features & Benefits

- High resolution nondestructive optical 3D measurement

- Real time confocal imaging

- Various optical zoom

- Simultaneous bright field and confocal imaging

- Automatic gain search with fine auto focus

- Inclination compensation

- Easy analysis mode

- Precise and reliable high-speed height measurement

- Inspection of features through semi-transparent substrate

- No sample preparation

- Image stitching for wide range inspection

Surface profiling and Roughness measurement

Single profile of a line

Averaged profile along the groove

Surface roughness of ROI (region of interest)

Best focus 2D image (Top view) with Objective lens 50X

Application

field

NS-3600 is a promising solution for the measurement of height, width, angle, area, and volume of micro and submicro structures such as

- Semiconductor: IC pattern, bump height, wire loop height, defect inspection, CMP process

- FPD product: Touch panel screen inspection, ITO pattern, LCD column spacer height

- MEMS device: 3D profile of structure, surface roughness, MEMS pattern

- Glass surfaces: Thin film solar cell, solar cell texture, laser pattern

- Material researches: Tooling surface inspection, roughness, crack analysis