Plasma Batch Type Systems
Plasma Surface Treatment。Plasma Backend。Configurations。GIGA 690。GIGA 690 Inline。GIGA 690 Autofab。The versatile GIGA 690 is a reliable batch backend tool. It is used as a comm
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Plasma Surface Treatment
Plasma Backend
Configurations
GIGA 690
GIGA 690 Inline
GIGA 690 Autofab
The versatile GIGA 690 is a reliable batch backend tool. It is used as a common platform to cover different tasks, from a standalone single solution up to fully automated cluster system.
The substrates / products will be treated in a batch type product carrier.
Applications
GIGA 690, GIGA 690IL and GIGA 690 Autofab
BGAs, lead frames, PCBs and wafers
Activation before molding, underfill, coating
Cleaning before wire bond
Pre flip chip underfill
Pre solder ball attach
Substrate & wafer cleaning / activation
Up to 6 magazines batch processing
Substrate cleaning / activation of alternative products like sensors, medical components and other parts
GIGA 690 and GIGA 690 Inline
Flexibility: broad spectrum of applications and possibilities
GHz plasma, aluminium chamber, ceramic window
No electrodes inside chamber
2 different chamber sizes (64 or 91 litres)
GIGA 690 AutoFab
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