Plasma Strip Type Systems
Plasma Strip Type Systems
Plasma Surface Treatment。80 Plus 2.45 GHz for chemical etch characteristic Strip type automation meets flat large plasma chamber
广西科米瑞实验仪器设备有限公司生产销售 PVA TePla Plasma Strip Type Systems，可提供产品参数、报价和售后服务咨询，价格面议。
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Plasma Surface Treatment
Plasma Backend
Configurations
80 Plus 2.45 GHz for chemical etch characteristic Strip type automation meets flat large plasma chamber
80 Plus IoN With RF 13.56 MHz for physical surface treatment via ion bombardment
80 Plus HS 2,45GHz for chemical etch characteristic Strip type automation with unique loadlock vacuum chamber and flat large plasma processing chamber
80 Plus HS IoN with RF 13.56 MHz for physical surface treatment via ion bombardement
The 80 PLUS and 80 PLUS HS plasma systems are automated solutions with ingenious load/unload automation to transport the strip type products or wafers in the plasma chamber. This system meets all requirements to eliminate operator errors and save human resources through high efficiency.
80 Plus
Fully automated strip handling
Advanced host-communication abilities
Broad variation of substrate dimensions possible
Preventing operator mistakes
80 Plus HS
Seamless production with parallel leadframe loading / unloading
The additional vacuum antechamber with magazine reduces the off-peak times
Unique jam detection
Prevention of operator errors and reduction of human intervention
Productivity: 200–800 units per hour (UPH)
80 Plus GIGA/IoN
GIGA 80 Plus HS
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