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Raith CHIPSCANNER - Large-area 3D SEM imaging

CHIPSCANNER

Fully automated image acquisition。:Active focus control。:Field-of-view corrections for artefact-free stitching

品牌: Raith价格: 面议服务区域: 全国

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Raith CHIPSCANNER - Large-area 3D SEM imaging

:Introduction

:Key features

:Fully automated image acquisition

:Active focus control

:Field-of-view corrections for artefact-free stitching

:1 nm accurate positioning through Laser-Interferometer-Stage

:Highest stability through environmental shield

:SEM imaging taken to new dimensions

:High precision

:Enhanced accuracy

:High resolution

:High throughput

:Positioning

:Software

:Digital RAITH is the infrastructure for any nanolithography applications

:Sample levelling (automatic on 6-inch systems)

:Powerful customizable adjustments and calibrations

:Distortion free images

:Large area accuracy for 3D stacking

:High-speed image scanning with various detectors

:Image to CAD conversion

:CAD optimization

:High-speed mosaic viewer for result analysis

:Technical data

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