
Raith CHIPSCANNER - Large-area 3D SEM imaging
Fully automated image acquisition。:Active focus control。:Field-of-view corrections for artefact-free stitching
- 技术参数
- 1 nm accurate positioning through Laser-Interferometer-Stage

Fully automated image acquisition。:Active focus control。:Field-of-view corrections for artefact-free stitching
第 1 / 1 页 · 共 1 条