PPR - Vacuum Process Monitor

PPR Series Process Monitoring Systems The PPR Process Monitoring System is designed for in-line process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure. RGA Software Download RGA Windows (legacy software) 3D Step File 3D Step File (w/opt 2) RGA Basics RGA Ethernet Adapter Manual Replacement Ionizer Kit Vacuum Diagnosis Pressure Conversion Table RGA Volatility Statement Analog Scan File Format RGA100 Gas Analyzers RGA120 Gas Analyzers RGA Software Download RGA Windows (legacy software) 3D Step File 3D Step File (w/opt 2) RGA Basics Ethernet Adapt. Manual Replacement Ionizer Kit Vacuum Diagnosis Pressure Conversion Table RGA Volatility Statement Analog Scan File Format The PPR Process Monitoring System is designed for in-line process monitoring and diagnosis. Two paths are provided to the residual gas analyzer (RGA): a high conductivity path for monitoring base vacuum, and a pressure reducing path for monitoring the process at operating pressure. The pressure reducing path contains a micro-hole orifice which is designed to operate at one of the following pressures: 0.01, 0.1, 1 or 10 Torr. It reduces the sample pressure to the operating pressure of the RGA (about 10-6 Torr ). This pressure drop is maintained by the pumping system which consists of a hybrid turbomolecular pump and a diaphragm pump. Both pumps are oil free and will not contaminate your process. The inlet assembly that attaches to your process chamber can be configured in several ways (see drawings). The system includes an RGA, by-pass valve assembly and Tee, a controller, turbo pump, diaphragm pump, and Windows software program for data acquisition and control. The software is used to operate the instrument in various modes, including analog scan, histogram mode, and pressure vs. time mode. Both Faraday cup and electron multiplier detectors are standard with the PPR system. The electron multiplier provides additional sensitivity and higher scan speeds. The PPR system is shipped completely assembled and calibrated, and is ready to attach to your vacuum process chamber. Geometry A X Geometry A PPR Series Geometry B X Geometry B PPR Series 3 × 10 -5 mbar-L/s with pressure reduction inlet active 2 seconds at 0.1 mbar inlet pressure (scales linearly with pressure) 2.75" CF flange, rotatable with through holes Turbo pump to controller 6 ft. cable (provided) Turbo to backing pump 6 ft. flexible hose (provided), 1/4" ID × 7/16" OD RS-232C (28,800 baud, 9-pin D connector) RGA Windows application Hybrid turbomolecular/drag pump, 70 L/s, ultimate pressure 2 × 10 -9 mbar Diaphragm pump with ultimate pressure less than 1 mbar. Protection class IP44 Requires forced air cooling 110 VAC @ 60 Hz, 220 VAC @ 50 Hz (not field selectable, 300 W) Vary with configuration (see sample configurations) 16 lbs. (turbo pump, by-pass valve and Tee, RGA) 33 lbs. (diaphragm pump and controller) One year parts and labor on defects in material or workmanship. Pump seals and diaphragm warranted for 90 days.