Highly modular PVD systemKorvus Technology型号 HEX, HEX-L and HEX-XL Highly Modular PVD Systems
The HEX Series Download Brochure THE HEX SERIES The open frame design of our systems is the bedrock upon which the flexibility of the HEX series is built. No...
- 型号或系列
- HEX, HEX-L and HEX-XL Highly Modular PVD Systems
- 产品类别
- Highly modular PVD system
- Maximum Sample Size Diameter
- 4" (100mm) Deposition Sources: Up to 3 Magnetron Sputter Size (Diameter): 2" Chamber Volume: 12 L - (24 L When Stacked) Base Pressure: 5×10-7 mbar*
- Maximum Sample Size Diameter
- 6" (150mm) Deposition Sources: Up to 6 Magnetron Sputter Size (Diameter): 2" or 3" Chamber Volume: 50L - (100L When Stacked) Base Pressure: <5×10-7 mbar*