
Mad City Labs Nano-M3Z
控制器. 页面列出的重点包括: Compact piezo nanopositioner Three axis motion (Z θ X θ Y ) Low profile: 0.76" Closed loop control
- 型号
- Nano-M3Z
- 产品特点
- Compact piezo nanopositioner Three axis motion (Z θ X θ Y ) Low profile: 0.76" Closed loop control
- 典型应用
- Z-axis plus tip/tilt alignment Nanolithography Metrology Nano-alignment
- 技术参数
- Range of motion (Z) 50 μm Range of motion (θ X ) 3 mradian Range of motion (θ Y ) 3 mradian Resolution (Z) 0.1 nm Resolution (θ X ) 6 nradian Resolution (θ Y ) 6 nradian Resonant Frequency 100 Hz ±20% Stiffness 1.0 N/μm Recommended max. load (horizon











