SIRD
SIRD
Wafer Inspection。Scanning InfraRed Depolarization。Functional Description。A robot transfers the wafer from the carrier to the measurement stage. The carrier can be placed either
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Wafer Inspection
Scanning InfraRed Depolarization
Functional Description
A robot transfers the wafer from the carrier to the measurement stage. The carrier can be placed either by an operator or automatically via OHT.
The tool auto-tunes itself for optimal measurement settings, independent of the material's doping grade.
Data is recorded according to a predefined measurement protocol detailing the area of interest, resolution, and measurement mode.
After measurement, the wafer is returned to the carrier, and automated analysis of the measured map begins.
Numerical data, such as defect counts by type or intensity, and customizable reports are generated and, if desired, sent to the host via the standard SECS/GEM protocol.
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