E-LINE
Gemini technology-based ultra-high resolution electron optical column。:Single-digit nm resolution for EBL
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:Introduction
:Key features
:Gemini technology-based ultra-high resolution electron optical column
:Single-digit nm resolution for EBL
:Highest precision laser interferometer stage (2-inch, 4-inch, or 6-inch travel range)
:Various detectors for SEM imaging / metrology and analysis
:Wide range of nanoengineering options
:RAITH Nanosuite system control software
:Auto focus, auto stigmator, auto brightness, and auto contrast functionality
:A true bestseller in academia
:Multifunctionality
:Flexibility and versatility
:Modularity and upgradability
:Motion
:Perfect
:Shapes
:Positioning
:Software
:All you need to cope with your application specific requirements
:GDSII CAD layout editor
:Mix and Match capabilities
:Full exposure job automation & customization
:Dedicated imaging and metrology functionality
:True multi-user environment
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