Raith E-LINE - Multifunctional system family for maximum versatility
Gemini technology-based ultra-high resolution electron optical column。：Single-digit nm resolution for EBL
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Raith EBPG - Highest throughput, automation, and precision
Robust 100 kV column technology。：High-resolution lithography below 5 nm。：Automated wafer and multi-sample exposures
- 技术参数
- Robust 100 kV column technology
- 技术参数
- High-resolution lithography below 5 nm
Raith VOYAGER - High performance for shortest time to result
Highly ergonomic human-machine interface。：50 kV thermal field emission column technology
- 技术参数
- 50 kV thermal field emission column technology