
900i Series In-Line Sputtering Systems
Precision Batch Sputtering for Application-Critical Thin Films
- 型号
- 900i Series
- Product category
- Sputtering System
- Chamber Ultimate ≤ 1 x 10 -7 torr
- ≤ 1 x 10 -7 torr
- Chamber Leak Rate 20 min to 1 x 10 -4 torr
- 20 min to 1 x 10 -4 torr






















