NanoMOKE3 Wafer Mapper 晶圆映射克尔效应磁强计
NanoMOKE3 Wafer Mapper 是为在整片晶圆范围内测量磁滞回线和磁畴图像而配置的超高灵敏度克尔效应磁强计。
- 型号或系列
- NanoMOKE3
- Wafer handling
- Handles up to 330mm x 250mm wafers
- Wafer stage travel
- Wafer stage travelling range of 204mm in X and 164mm in Y
- Applied field
- 3000 G applied field in x and y or z projected from beneath the wafer allowing free movement of wafer above electromagnet Optional heating element to locally inject hot gas at the laser measurement point Sensitive to Longitudinal, Transverse a


