Beneq Transmute™
brings ALD precision to high-volume production. Built on Beneq’s proprietary 3-step ALD approach – combining plasma pre-treatment, plasma-enhanced ALD, and thermal batch ALD – i...
- 型号或系列
- Transmute™
- 产品类别
- High-volume semiconductor ALD platform
- 包含型号
- Beneq Transmute
- Wafer size
- 200 mm fabs