ASM International Intrepid ES / ESA 外延沉积系统
Intrepid ES 是 ASM 的先进外延沉积工具，面向先进晶体管和存储器的关键 300 mm 应用；Intrepid ESA 面向硅基模拟、功率器件和晶圆制造应用。
- 型号
- Intrepid ES / ESA
- 产品名称
- Intrepid® ES™ Intrepid® ESA™
- 产品说明
- The Intrepid® ES™ is our most advanced epitaxy deposition tool. It is designed for the most critical 300 mm applications for advanced transistors and memories. Our Intrepid® ESA™ is targeted for silicon-based analog/power devices and wa