- 型号或系列
- HEX, HEX-L and HEX-XL Highly Modular PVD Systems
- 产品类别
- Highly modular PVD system
- Maximum Sample Size Diameter
- 4" (100mm) Deposition Sources: Up to 3 Magnetron Sputter Size (Diameter): 2" Chamber Volume: 12 L - (24 L When Stacked) Base Pressure: 5×10-7 mbar*
- Maximum Sample Size Diameter
- 6" (150mm) Deposition Sources: Up to 6 Magnetron Sputter Size (Diameter): 2" or 3" Chamber Volume: 50L - (100L When Stacked) Base Pressure: <5×10-7 mbar*