NEXUS IBE Ion Beam Etch System
Unsurpassed Uniformity over Multiple Energy and Process Angles
- 型号
- NEXUS IBE Ion Beam Etch System
- 产品类别
- Ion Beam Etch System
- Application
- RF350 source for operations that have process-qualified use of RF350 source Platform can be cost-effec
- Technology
- ion beam etch uniformity with the NEXUS® IBE™ Ion Beam Etching System